extreme ultraviolet lithography

a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.
Thing next_generation_lithography Q371965
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extreme ultraviolet lithography

Summary

extreme ultraviolet lithography is a next-generation lithography[1]. It draws 962 Wikipedia views per month (next_generation_lithography category, ranking #1 of 1).[2]

Key Facts

  • extreme ultraviolet lithography's video is recorded as How EUV lithography works.webm[3].
  • extreme ultraviolet lithography's image is recorded as Lithographie EUV.jpg[4].
  • extreme ultraviolet lithography's instance of is recorded as next-generation lithography[5].
  • extreme ultraviolet lithography's instance of is recorded as ultraviolet lithography[6].
  • extreme ultraviolet lithography's GND ID is recorded as 1299519369[7].
  • extreme ultraviolet lithography's has use is recorded as semiconductor device fabrication[8].
  • extreme ultraviolet lithography's Commons category is recorded as Extreme ultraviolet lithography[9].
  • extreme ultraviolet lithography's Freebase ID is recorded as /m/06qsy6[10].
  • extreme ultraviolet lithography's facet of is recorded as ultraviolet lithography[11].
  • extreme ultraviolet lithography's short name is recorded as {'lang': 'en', 'text': 'EUV'}[12].
  • extreme ultraviolet lithography's Microsoft Academic ID is recorded as 162996421[13].
  • extreme ultraviolet lithography's OpenAlex ID is recorded as C162996421[14].
  • extreme ultraviolet lithography's Encyclopedia of China is recorded as 124510[15].

Why It Matters

extreme ultraviolet lithography draws 962 Wikipedia views per month (next_generation_lithography category, ranking #1 of 1).[2] It has Wikipedia articles in 15 language editions, a strong signal of global cultural recognition.[16] It is known by 16 alternative names across languages and contexts.[17]

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [3] . wikidata.org.
  2. [4] . wikidata.org.
  3. [5] . wikidata.org.
  4. [6] . wikidata.org.
  5. [7] . wikidata.org.
  6. [8] . wikidata.org.
  7. [9] . wikidata.org.
  8. [10] . Freebase Data Dumps. wikidata.org.
  9. [11] . wikidata.org.
  10. [12] . wikidata.org.
  11. [13] . wikidata.org.
  12. [14] . OpenAlex. Retrieved . docs.openalex.org. Provenance: wikidata.org.
  13. [15] . wikidata.org.

Class ancestry

  1. [1] . Wikidata. wikidata.org.

Aggregate / graph-position facts

  1. [2] . Wikimedia Foundation. dumps.wikimedia.org.
  2. [16] . Wikidata sitelinks. wikidata.org.
  3. [17] . Wikidata aliases. wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). extreme ultraviolet lithography. Retrieved May 3, 2026, from https://4ort.xyz/entity/extreme-ultraviolet-lithography
MLA “extreme ultraviolet lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 3 May. 2026, https://4ort.xyz/entity/extreme-ultraviolet-lithography.
BibTeX @misc{4ortxyz_extreme-ultraviolet-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{extreme ultraviolet lithography}}, year = {2026}, url = {https://4ort.xyz/entity/extreme-ultraviolet-lithography}, note = {Accessed: 2026-05-03}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): extreme ultraviolet lithography — https://4ort.xyz/entity/extreme-ultraviolet-lithography (retrieved 2026-05-03)

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