Home › Entities › next_generation_lithography › extreme ultraviolet lithography

extreme ultraviolet lithography

a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.
Thing next_generation_lithography Q371965

Facts

7 properties
Instance of
next-generation lithography, ultraviolet lithography[2]
Has use
semiconductor device fabrication[3]
Facet of
ultraviolet lithography[4]
Short name
EUV[5]
Image harvest run
pdhero-20261109T032439Z
Image last checked license
CC BY-SA 3.0
Image unavailable reason
no_pd_license
🏷️ Also known as
en EUVL en EUV lithography en extreme ultraviolet lithography ar الأشعة فوق البنفسجية المتطرفة de EUV-Lithographie de EUV-Lithografie de EUVL es EUV es EUVL es Fotolitografia ultravioleta extrema es Litografía ultravioleta extrema es LUV es LUVE es UE fa لیتوگرافی به وسیله اشعه ماوراء بنفش fr Lithographie extrême ultraviolet fr Lithographie Extreme UltraViolet fr Technologie EUV id Litografi ultraviolet ekstrim it Litografia ultravioletta estrema
🔖 Identifiers · 8
GND ID
1299519369
OpenAlex ID
C162996421
Image (Wikimedia Commons)
Lithographie EUV.jpg ↗
Encyclopedia of China (Third Edition) ID (2026)
1LcGWf
Encyclopedia of China (Third Edition) old ID (2021)
124510
Freebase ID
/m/06qsy6
J-GLOBAL ID
201006098537932420
Microsoft Academic ID (discontinued)
162996421

Report an error or request removal Lineage (PROV-JSON)

🔗 Connections
Has use 1
semiconductor device fabrication
Press Enter · cited answer in seconds

Summary

extreme ultraviolet lithography is a next-generation lithography[1].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [2] ↑ . wikidata.org.
  2. [3] ↑ . wikidata.org.
  3. [4] ↑ . wikidata.org.
  4. [5] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). extreme ultraviolet lithography. Retrieved November 7, 2026, from https://4ort.xyz/entity/extreme-ultraviolet-lithography
MLA “extreme ultraviolet lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 7 Nov. 2026, https://4ort.xyz/entity/extreme-ultraviolet-lithography.
BibTeX @misc{4ortxyz_extreme-ultraviolet-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{extreme ultraviolet lithography}}, year = {2026}, url = {https://4ort.xyz/entity/extreme-ultraviolet-lithography}, note = {Accessed: 2026-11-07}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): extreme ultraviolet lithography — https://4ort.xyz/entity/extreme-ultraviolet-lithography (retrieved 2026-11-07)

Canonical URL: https://4ort.xyz/entity/extreme-ultraviolet-lithography · Last refreshed:

Edit History

Rolling log of changes to this entity's Wikidata record. Values shown reflect the current state of each edited property — follow the history link to see the precise diff for any edit.

  1. 5w ago · Ottawajin · 2026-09-29 view diff on Wikidata ↗
    J-GLOBAL ID → 201006098537932420
    Wikipedia title → EUV lithography
    "Created claim: J-GLOBAL ID: 201006098537932420, Matched to extreme ultraviolet lithography (#262117013) in [[:toollabs:mix-n-match/#/ca"
  2. 17w ago · Nyuhn · 2026-07-10 view diff on Wikidata ↗
    Instance of → next-generation lithography, ultraviolet lithography
    Has use → semiconductor device fabrication
    Encyclopedia of China (Third Edition) ID (2026) → 1LcGWf
    Facet of → ultraviolet lithography
    "Changed the item: QuickStatements 3.0 batch #40849: ZGBK ID"
Live feed via Wikidata EventStreams. New edits appear within minutes of being made on Wikidata.