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next-generation lithography

technical term
Class type of: lithography Q1983848

Facts

1 property
Subclass of
lithography[1]
🏷️ Also known as
en next-generation lithography en NGL de Next-Generation-Lithografie de Next Generation Lithography ja 次世代リソグラフィ tr yeni nesil litografi zh 下一代光刻 zh 下一代微影
🔖 Identifiers · 3
OpenAlex ID
C163581340
Freebase ID
/m/06qt2n
Microsoft Academic ID (discontinued)
163581340

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Direct Wikidata claims

  1. [1] ↑ . wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). next-generation lithography. Retrieved November 8, 2026, from https://4ort.xyz/entity/next-generation-lithography
MLA “next-generation lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 8 Nov. 2026, https://4ort.xyz/entity/next-generation-lithography.
BibTeX @misc{4ortxyz_next-generation-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{next-generation lithography}}, year = {2026}, url = {https://4ort.xyz/entity/next-generation-lithography}, note = {Accessed: 2026-11-08}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): next-generation lithography — https://4ort.xyz/entity/next-generation-lithography (retrieved 2026-11-08)

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