Unbiased roughness measurements: Subtracting out SEM effects, part 2

Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2018) · cited 12× · AI/ML
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Unbiased roughness measurements: Subtracting out SEM effects, part 2

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Unbiased roughness measurements: Subtracting out SEM effects, part 2 is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Unbiased roughness measurements: Subtracting out SEM effects, part 2. Retrieved May 24, 2026, from https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects-part-2
MLA “Unbiased roughness measurements: Subtracting out SEM effects, part 2.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects-part-2.
BibTeX @misc{4ortxyz_unbiased-roughness-measurements-subtracting-out-sem-effects-part-2_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Unbiased roughness measurements: Subtracting out SEM effects, part 2}}, year = {2026}, url = {https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects-part-2}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Unbiased roughness measurements: Subtracting out SEM effects, part 2 — https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects-part-2 (retrieved 2026-05-24)

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