Unbiased roughness measurements: Subtracting out SEM effects
Research article (Microelectronic Engineering, 2018) · cited 49× · AI/ML
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- [2] ↑ Unbiased roughness measurements: Subtracting out SEM effects — instance of (P31): scholarly article. wikidata.org.
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4ort.xyz Knowledge Graph. (2026). Unbiased roughness measurements: Subtracting out SEM effects. Retrieved May 24, 2026, from https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects
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“Unbiased roughness measurements: Subtracting out SEM effects.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects.
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@misc{4ortxyz_unbiased-roughness-measurements-subtracting-out-sem-effects_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Unbiased roughness measurements: Subtracting out SEM effects}}, year = {2026}, url = {https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects}, note = {Accessed: 2026-05-24}}
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