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Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection

Research article (IEEE Access, 2022) · cited 11× · AI/ML
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Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection

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Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection is a scholarly article[1].

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  • Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection. Retrieved May 24, 2026, from https://4ort.xyz/entity/supervised-multivariate-kernel-density-estimation-for-enhanced-plasma-etching-endpoint-detection
MLA “Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/supervised-multivariate-kernel-density-estimation-for-enhanced-plasma-etching-endpoint-detection.
BibTeX @misc{4ortxyz_supervised-multivariate-kernel-density-estimation-for-enhanced-plasma-etching-endpoint-detection_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection}}, year = {2026}, url = {https://4ort.xyz/entity/supervised-multivariate-kernel-density-estimation-for-enhanced-plasma-etching-endpoint-detection}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection — https://4ort.xyz/entity/supervised-multivariate-kernel-density-estimation-for-enhanced-plasma-etching-endpoint-detection (retrieved 2026-05-24)

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