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SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

Research article (Microsystems & Nanoengineering, 2016) · cited 39× · AI/ML
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Summary

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators is a scholarly article[1].

Key Facts

  • SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators. Retrieved October 17, 2026, from https://4ort.xyz/entity/su8-etch-mask-for-patterning-pdms-and-its-application-to-flexible-fluidic-microactuators
MLA “SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators.” 4ort.xyz Knowledge Graph, 4ort.xyz, 17 Oct. 2026, https://4ort.xyz/entity/su8-etch-mask-for-patterning-pdms-and-its-application-to-flexible-fluidic-microactuators.
BibTeX @misc{4ortxyz_su8-etch-mask-for-patterning-pdms-and-its-application-to-flexible-fluidic-microactuators_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators}}, year = {2026}, url = {https://4ort.xyz/entity/su8-etch-mask-for-patterning-pdms-and-its-application-to-flexible-fluidic-microactuators}, note = {Accessed: 2026-10-17}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators — https://4ort.xyz/entity/su8-etch-mask-for-patterning-pdms-and-its-application-to-flexible-fluidic-microactuators (retrieved 2026-10-17)

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