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Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride
Research article (Journal of Applied Physics, 2015) · cited 14× · AI/ML
Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride
Summary
Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride is a scholarly article[1].
Key Facts
Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride. Retrieved May 24, 2026, from https://4ort.xyz/entity/structural-study-of-growth-orientation-and-defects-characteristics-in-the-functional-microelectromechanical-system-mater
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BibTeX@misc{4ortxyz_structural-study-of-growth-orientation-and-defects-characteristics-in-the-functional-microelectromechanical-system-mater_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride}}, year = {2026}, url = {https://4ort.xyz/entity/structural-study-of-growth-orientation-and-defects-characteristics-in-the-functional-microelectromechanical-system-mater}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride — https://4ort.xyz/entity/structural-study-of-growth-orientation-and-defects-characteristics-in-the-functional-microelectromechanical-system-mater (retrieved 2026-05-24)
