Simulating the warping of thin coated Si wafers using Ansys layered shell elements

Research article (Composite Structures, 2016) · cited 40× · AI/ML
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Simulating the warping of thin coated Si wafers using Ansys layered shell elements is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Simulating the warping of thin coated Si wafers using Ansys layered shell elements. Retrieved May 24, 2026, from https://4ort.xyz/entity/simulating-the-warping-of-thin-coated-si-wafers-using-ansys-layered-shell-elements
MLA “Simulating the warping of thin coated Si wafers using Ansys layered shell elements.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/simulating-the-warping-of-thin-coated-si-wafers-using-ansys-layered-shell-elements.
BibTeX @misc{4ortxyz_simulating-the-warping-of-thin-coated-si-wafers-using-ansys-layered-shell-elements_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Simulating the warping of thin coated Si wafers using Ansys layered shell elements}}, year = {2026}, url = {https://4ort.xyz/entity/simulating-the-warping-of-thin-coated-si-wafers-using-ansys-layered-shell-elements}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Simulating the warping of thin coated Si wafers using Ansys layered shell elements — https://4ort.xyz/entity/simulating-the-warping-of-thin-coated-si-wafers-using-ansys-layered-shell-elements (retrieved 2026-05-24)

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