Home › Entities › academia › SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM

SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 14× · AI/ML
academia openalex:W2600603926
Press Enter · cited answer in seconds

SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM

Summary

SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM is a scholarly article[1].

Key Facts

  • SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM's instance of is recorded as scholarly article[2].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM. Retrieved May 24, 2026, from https://4ort.xyz/entity/sem-based-overlay-measurement-between-via-patterns-and-buried-m1-patterns-using-high-voltage-sem
MLA “SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/sem-based-overlay-measurement-between-via-patterns-and-buried-m1-patterns-using-high-voltage-sem.
BibTeX @misc{4ortxyz_sem-based-overlay-measurement-between-via-patterns-and-buried-m1-patterns-using-high-voltage-sem_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM}}, year = {2026}, url = {https://4ort.xyz/entity/sem-based-overlay-measurement-between-via-patterns-and-buried-m1-patterns-using-high-voltage-sem}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM — https://4ort.xyz/entity/sem-based-overlay-measurement-between-via-patterns-and-buried-m1-patterns-using-high-voltage-sem (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/sem-based-overlay-measurement-between-via-patterns-and-buried-m1-patterns-using-high-voltage-sem · Last refreshed: