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Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology

Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2016) · cited 22× · AI/ML
academia openalex:W2520043551
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Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology

Summary

Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology is a scholarly article[1].

Key Facts

  • Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology. Retrieved May 24, 2026, from https://4ort.xyz/entity/scanning-coherent-diffractive-imaging-methods-for-actinic-extreme-ultraviolet-mask-metrology
MLA “Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/scanning-coherent-diffractive-imaging-methods-for-actinic-extreme-ultraviolet-mask-metrology.
BibTeX @misc{4ortxyz_scanning-coherent-diffractive-imaging-methods-for-actinic-extreme-ultraviolet-mask-metrology_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology}}, year = {2026}, url = {https://4ort.xyz/entity/scanning-coherent-diffractive-imaging-methods-for-actinic-extreme-ultraviolet-mask-metrology}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology — https://4ort.xyz/entity/scanning-coherent-diffractive-imaging-methods-for-actinic-extreme-ultraviolet-mask-metrology (retrieved 2026-05-24)

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