Rotational MEMS mirror with latching arm for silicon photonics

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 21× · AI/ML
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Rotational MEMS mirror with latching arm for silicon photonics

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Rotational MEMS mirror with latching arm for silicon photonics is a scholarly article[1].

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  • Rotational MEMS mirror with latching arm for silicon photonics's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Rotational MEMS mirror with latching arm for silicon photonics. Retrieved May 24, 2026, from https://4ort.xyz/entity/rotational-mems-mirror-with-latching-arm-for-silicon-photonics
MLA “Rotational MEMS mirror with latching arm for silicon photonics.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/rotational-mems-mirror-with-latching-arm-for-silicon-photonics.
BibTeX @misc{4ortxyz_rotational-mems-mirror-with-latching-arm-for-silicon-photonics_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Rotational MEMS mirror with latching arm for silicon photonics}}, year = {2026}, url = {https://4ort.xyz/entity/rotational-mems-mirror-with-latching-arm-for-silicon-photonics}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Rotational MEMS mirror with latching arm for silicon photonics — https://4ort.xyz/entity/rotational-mems-mirror-with-latching-arm-for-silicon-photonics (retrieved 2026-05-24)

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