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Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process

Research article (Industrial & Engineering Chemistry Research, 2021) · cited 17× · AI/ML
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Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process

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Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process is a scholarly article[1].

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  • Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process's instance of is recorded as scholarly article[2].

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

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  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process. Retrieved May 24, 2026, from https://4ort.xyz/entity/recurrent-neural-network-based-model-predictive-control-of-a-plasma-etch-process
MLA “Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/recurrent-neural-network-based-model-predictive-control-of-a-plasma-etch-process.
BibTeX @misc{4ortxyz_recurrent-neural-network-based-model-predictive-control-of-a-plasma-etch-process_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process}}, year = {2026}, url = {https://4ort.xyz/entity/recurrent-neural-network-based-model-predictive-control-of-a-plasma-etch-process}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process — https://4ort.xyz/entity/recurrent-neural-network-based-model-predictive-control-of-a-plasma-etch-process (retrieved 2026-05-24)

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