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Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process

Research article (International Journal of Engineering and Technology, 2015) · cited 74× · AI/ML
academia openalex:W4255500610
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Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process

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Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process is a scholarly article[1].

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  • Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process's instance of is recorded as scholarly article[2].

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

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  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process. Retrieved May 24, 2026, from https://4ort.xyz/entity/predictive-models-for-equipment-fault-detection-in-the-semiconductor-manufacturing-process
MLA “Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/predictive-models-for-equipment-fault-detection-in-the-semiconductor-manufacturing-process.
BibTeX @misc{4ortxyz_predictive-models-for-equipment-fault-detection-in-the-semiconductor-manufacturing-process_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process}}, year = {2026}, url = {https://4ort.xyz/entity/predictive-models-for-equipment-fault-detection-in-the-semiconductor-manufacturing-process}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process — https://4ort.xyz/entity/predictive-models-for-equipment-fault-detection-in-the-semiconductor-manufacturing-process (retrieved 2026-05-24)

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