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Off-axis illumination

optical system setup in photolithography
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Off-axis illumination

Summary

Key Facts

  • Off-axis illumination's Freebase ID is recorded as /m/0808pp_[1].
  • Off-axis illumination's Microsoft Academic ID is recorded as 82895050[2].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [1] ↑ . wikidata.org.
  2. [2] ↑ . wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). Off-axis illumination. Retrieved May 7, 2026, from https://4ort.xyz/entity/off-axis-illumination
MLA “Off-axis illumination.” 4ort.xyz Knowledge Graph, 4ort.xyz, 7 May. 2026, https://4ort.xyz/entity/off-axis-illumination.
BibTeX @misc{4ortxyz_off-axis-illumination_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Off-axis illumination}}, year = {2026}, url = {https://4ort.xyz/entity/off-axis-illumination}, note = {Accessed: 2026-05-07}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Off-axis illumination — https://4ort.xyz/entity/off-axis-illumination (retrieved 2026-05-07)

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