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NXE pellicle: offering a EUV pellicle solution to the industry

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 36× · AI/ML
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NXE pellicle: offering an EUV pellicle solution to the industry

Summary

NXE pellicle: offering an EUV pellicle solution to the industry is a scholarly article[1].

Key Facts

  • NXE pellicle: offering an EUV pellicle solution to the industry's instance of is recorded as scholarly article[2].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). NXE pellicle: offering a EUV pellicle solution to the industry. Retrieved May 24, 2026, from https://4ort.xyz/entity/nxe-pellicle-offering-a-euv-pellicle-solution-to-the-industry
MLA “NXE pellicle: offering a EUV pellicle solution to the industry.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/nxe-pellicle-offering-a-euv-pellicle-solution-to-the-industry.
BibTeX @misc{4ortxyz_nxe-pellicle-offering-a-euv-pellicle-solution-to-the-industry_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{NXE pellicle: offering a EUV pellicle solution to the industry}}, year = {2026}, url = {https://4ort.xyz/entity/nxe-pellicle-offering-a-euv-pellicle-solution-to-the-industry}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): NXE pellicle: offering a EUV pellicle solution to the industry — https://4ort.xyz/entity/nxe-pellicle-offering-a-euv-pellicle-solution-to-the-industry (retrieved 2026-05-24)

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