Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition

Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2021) · cited 120× · AI/ML
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Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition

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Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition is a scholarly article[1].

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  • Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition. Retrieved May 24, 2026, from https://4ort.xyz/entity/next-generation-nanopatterning-using-small-molecule-inhibitors-for-area-selective-atomic-layer-deposition
MLA “Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/next-generation-nanopatterning-using-small-molecule-inhibitors-for-area-selective-atomic-layer-deposition.
BibTeX @misc{4ortxyz_next-generation-nanopatterning-using-small-molecule-inhibitors-for-area-selective-atomic-layer-deposition_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition}}, year = {2026}, url = {https://4ort.xyz/entity/next-generation-nanopatterning-using-small-molecule-inhibitors-for-area-selective-atomic-layer-deposition}, note = {Accessed: 2026-05-24}}
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