Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA)

Research article (Microelectronic Engineering, 2017) · cited 11× · AI/ML
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Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA)

Summary

Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA) is a scholarly article[1].

Key Facts

  • Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA)'s instance of is recorded as scholarly article[2].

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Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA). Retrieved May 24, 2026, from https://4ort.xyz/entity/negative-tone-photolithography-with-photo-sensitised-polymethyl-methacrylate-pmma
MLA “Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA).” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/negative-tone-photolithography-with-photo-sensitised-polymethyl-methacrylate-pmma.
BibTeX @misc{4ortxyz_negative-tone-photolithography-with-photo-sensitised-polymethyl-methacrylate-pmma_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA)}}, year = {2026}, url = {https://4ort.xyz/entity/negative-tone-photolithography-with-photo-sensitised-polymethyl-methacrylate-pmma}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA) — https://4ort.xyz/entity/negative-tone-photolithography-with-photo-sensitised-polymethyl-methacrylate-pmma (retrieved 2026-05-24)

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