Home › Entities › academia › Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography

Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography

Research article (Procedia Engineering, 2015) · cited 16× · AI/ML
academia openalex:W2191020063
Press Enter · cited answer in seconds

Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography

Summary

Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography is a scholarly article[1].

Key Facts

  • Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography's instance of is recorded as scholarly article[2].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/multiple-patterning-with-process-optimization-method-for-maskless-dmd-based-grayscale-lithography
MLA “Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/multiple-patterning-with-process-optimization-method-for-maskless-dmd-based-grayscale-lithography.
BibTeX @misc{4ortxyz_multiple-patterning-with-process-optimization-method-for-maskless-dmd-based-grayscale-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography}}, year = {2026}, url = {https://4ort.xyz/entity/multiple-patterning-with-process-optimization-method-for-maskless-dmd-based-grayscale-lithography}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography — https://4ort.xyz/entity/multiple-patterning-with-process-optimization-method-for-maskless-dmd-based-grayscale-lithography (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/multiple-patterning-with-process-optimization-method-for-maskless-dmd-based-grayscale-lithography · Last refreshed: