Multi-spectral snapshot diffraction-based overlay metrology
Research article (Optics Letters, 2023) · cited 10× · AI/ML
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- [2] ↑ Multi-spectral snapshot diffraction-based overlay metrology — instance of (P31): scholarly article. wikidata.org.
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4ort.xyz Knowledge Graph. (2026). Multi-spectral snapshot diffraction-based overlay metrology. Retrieved May 24, 2026, from https://4ort.xyz/entity/multi-spectral-snapshot-diffraction-based-overlay-metrology
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“Multi-spectral snapshot diffraction-based overlay metrology.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/multi-spectral-snapshot-diffraction-based-overlay-metrology.
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@misc{4ortxyz_multi-spectral-snapshot-diffraction-based-overlay-metrology_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Multi-spectral snapshot diffraction-based overlay metrology}}, year = {2026}, url = {https://4ort.xyz/entity/multi-spectral-snapshot-diffraction-based-overlay-metrology}, note = {Accessed: 2026-05-24}}
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