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Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Research article (Materials Science-Poland, 2015) · cited 58× · AI/ML
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Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Summary

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering is a scholarly article[1].

Key Facts

  • Morphological features in aluminum nitride epilayers prepared by magnetron sputtering's instance of is recorded as scholarly article[2].

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Morphological features in aluminum nitride epilayers prepared by magnetron sputtering. Retrieved May 24, 2026, from https://4ort.xyz/entity/morphological-features-in-aluminum-nitride-epilayers-prepared-by-magnetron-sputtering
MLA “Morphological features in aluminum nitride epilayers prepared by magnetron sputtering.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/morphological-features-in-aluminum-nitride-epilayers-prepared-by-magnetron-sputtering.
BibTeX @misc{4ortxyz_morphological-features-in-aluminum-nitride-epilayers-prepared-by-magnetron-sputtering_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Morphological features in aluminum nitride epilayers prepared by magnetron sputtering}}, year = {2026}, url = {https://4ort.xyz/entity/morphological-features-in-aluminum-nitride-epilayers-prepared-by-magnetron-sputtering}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Morphological features in aluminum nitride epilayers prepared by magnetron sputtering — https://4ort.xyz/entity/morphological-features-in-aluminum-nitride-epilayers-prepared-by-magnetron-sputtering (retrieved 2026-05-24)

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