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MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS
Research article (International journal of industrial engineering, 2019) · cited 10× · AI/ML
MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS
Summary
MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS is a scholarly article[1].
Key Facts
MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS's instance of is recorded as scholarly article[2].
References
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Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS. Retrieved May 24, 2026, from https://4ort.xyz/entity/modelling-and-decision-support-system-for-intelligent-manufacturing-an-empirical-study-for-feedforward-feedback-learning
MLA“MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/modelling-and-decision-support-system-for-intelligent-manufacturing-an-empirical-study-for-feedforward-feedback-learning.
BibTeX@misc{4ortxyz_modelling-and-decision-support-system-for-intelligent-manufacturing-an-empirical-study-for-feedforward-feedback-learning_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS}}, year = {2026}, url = {https://4ort.xyz/entity/modelling-and-decision-support-system-for-intelligent-manufacturing-an-empirical-study-for-feedforward-feedback-learning}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS — https://4ort.xyz/entity/modelling-and-decision-support-system-for-intelligent-manufacturing-an-empirical-study-for-feedforward-feedback-learning (retrieved 2026-05-24)
