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Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering
Research article (Journal of Alloys and Compounds, 2016) · cited 62× · AI/ML
Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering
Summary
Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering is a scholarly article[1].
Key Facts
Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering. Retrieved May 24, 2026, from https://4ort.xyz/entity/microstructure-and-hydrogen-impermeability-of-titanium-nitride-thin-films-deposited-by-direct-current-reactive-magnetron
MLA“Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/microstructure-and-hydrogen-impermeability-of-titanium-nitride-thin-films-deposited-by-direct-current-reactive-magnetron.
BibTeX@misc{4ortxyz_microstructure-and-hydrogen-impermeability-of-titanium-nitride-thin-films-deposited-by-direct-current-reactive-magnetron_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering}}, year = {2026}, url = {https://4ort.xyz/entity/microstructure-and-hydrogen-impermeability-of-titanium-nitride-thin-films-deposited-by-direct-current-reactive-magnetron}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering — https://4ort.xyz/entity/microstructure-and-hydrogen-impermeability-of-titanium-nitride-thin-films-deposited-by-direct-current-reactive-magnetron (retrieved 2026-05-24)
