MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 19× · AI/ML
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MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies

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MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies. Retrieved May 24, 2026, from https://4ort.xyz/entity/mems-mirror-based-trajectory-resolution-and-precision-enabled-by-two-different-piezoresistive-sensor-technologies
MLA “MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/mems-mirror-based-trajectory-resolution-and-precision-enabled-by-two-different-piezoresistive-sensor-technologies.
BibTeX @misc{4ortxyz_mems-mirror-based-trajectory-resolution-and-precision-enabled-by-two-different-piezoresistive-sensor-technologies_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies}}, year = {2026}, url = {https://4ort.xyz/entity/mems-mirror-based-trajectory-resolution-and-precision-enabled-by-two-different-piezoresistive-sensor-technologies}, note = {Accessed: 2026-05-24}}
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