Participant: University of Bergen[3], Trinity College, Dublin[4], Norwegian University of Science and Technology[5], eu_cordis_org:999995893[6], eu_cordis_org:923478413[7], eu_cordis_org:952868637[8]
Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution. Retrieved October 8, 2026, from https://4ort.xyz/entity/mask-based-lithography-for-fast-large-scale-pattern-generation-with-nanometer-resolution
MLA“Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution.” 4ort.xyz Knowledge Graph, 4ort.xyz, 8 Oct. 2026, https://4ort.xyz/entity/mask-based-lithography-for-fast-large-scale-pattern-generation-with-nanometer-resolution.
BibTeX@misc{4ortxyz_mask-based-lithography-for-fast-large-scale-pattern-generation-with-nanometer-resolution_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution}}, year = {2026}, url = {https://4ort.xyz/entity/mask-based-lithography-for-fast-large-scale-pattern-generation-with-nanometer-resolution}, note = {Accessed: 2026-10-08}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution — https://4ort.xyz/entity/mask-based-lithography-for-fast-large-scale-pattern-generation-with-nanometer-resolution (retrieved 2026-10-08)
