Lithographic imaging-driven pattern edge placement errors at the 10-nm node

Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2016) · cited 12× · AI/ML

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Lithographic imaging-driven pattern edge placement errors at the 10-nm node

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Lithographic imaging-driven pattern edge placement errors at the 10-nm node is a scholarly article^[1].

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Lithographic imaging-driven pattern edge placement errors at the 10-nm node's instance of is recorded as scholarly article^[2].

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Authored by 4

Jacek K. Tyminski, Julia A. Sakamoto, Shane R. Palmer, Stephen P. Renwick

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Jacek K. Tyminski, Julia A. Sakamoto, Shane R. Palmer, Stephen P. Renwick

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[2] ↑ Lithographic imaging-driven pattern edge placement errors at the 10-nm node — instance of (P31): scholarly article. wikidata.org.

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[1] ↑ Lithographic imaging-driven pattern edge placement errors at the 10-nm node is an instance of scholarly article (scholarly article) [P31, primary]. Wikidata. wikidata.org.

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4ort.xyz Knowledge Graph. (2026). Lithographic imaging-driven pattern edge placement errors at the 10-nm node. Retrieved May 24, 2026, from https://4ort.xyz/entity/lithographic-imaging-driven-pattern-edge-placement-errors-at-the-10-nm-node

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“Lithographic imaging-driven pattern edge placement errors at the 10-nm node.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/lithographic-imaging-driven-pattern-edge-placement-errors-at-the-10-nm-node.

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@misc{4ortxyz_lithographic-imaging-driven-pattern-edge-placement-errors-at-the-10-nm-node_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Lithographic imaging-driven pattern edge placement errors at the 10-nm node}}, year = {2026}, url = {https://4ort.xyz/entity/lithographic-imaging-driven-pattern-edge-placement-errors-at-the-10-nm-node}, note = {Accessed: 2026-05-24}}

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According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Lithographic imaging-driven pattern edge placement errors at the 10-nm node — https://4ort.xyz/entity/lithographic-imaging-driven-pattern-edge-placement-errors-at-the-10-nm-node (retrieved 2026-05-24)

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