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L2O-ILT: Learning to Optimize Inverse Lithography Techniques

Research article (IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2023) · cited 16× · AI/ML
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L2O-ILT: Learning to Optimize Inverse Lithography Techniques

Summary

L2O-ILT: Learning to Optimize Inverse Lithography Techniques is a scholarly article[1].

Key Facts

  • L2O-ILT: Learning to Optimize Inverse Lithography Techniques's instance of is recorded as scholarly article[2].

Related Entities

Martin D. F. Wong

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

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  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). L2O-ILT: Learning to Optimize Inverse Lithography Techniques. Retrieved May 24, 2026, from https://4ort.xyz/entity/l2o-ilt-learning-to-optimize-inverse-lithography-techniques
MLA “L2O-ILT: Learning to Optimize Inverse Lithography Techniques.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/l2o-ilt-learning-to-optimize-inverse-lithography-techniques.
BibTeX @misc{4ortxyz_l2o-ilt-learning-to-optimize-inverse-lithography-techniques_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{L2O-ILT: Learning to Optimize Inverse Lithography Techniques}}, year = {2026}, url = {https://4ort.xyz/entity/l2o-ilt-learning-to-optimize-inverse-lithography-techniques}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): L2O-ILT: Learning to Optimize Inverse Lithography Techniques — https://4ort.xyz/entity/l2o-ilt-learning-to-optimize-inverse-lithography-techniques (retrieved 2026-05-24)

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