Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process

Research article (IEEE Transactions on Semiconductor Manufacturing, 2023) · cited 11× · AI/ML
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Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process

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Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process. Retrieved May 24, 2026, from https://4ort.xyz/entity/iterative-learning-based-predictive-control-method-for-electronic-grade-silicon-single-crystal-batch-process
MLA “Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/iterative-learning-based-predictive-control-method-for-electronic-grade-silicon-single-crystal-batch-process.
BibTeX @misc{4ortxyz_iterative-learning-based-predictive-control-method-for-electronic-grade-silicon-single-crystal-batch-process_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process}}, year = {2026}, url = {https://4ort.xyz/entity/iterative-learning-based-predictive-control-method-for-electronic-grade-silicon-single-crystal-batch-process}, note = {Accessed: 2026-05-24}}
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