Ion beam lithography

lithographic technique that uses a scanning ion beam
Thing general Q1672059
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Ion beam lithography

Summary

Ion beam lithography ranks in the top 2% of general entities by monthly Wikipedia readership (24 views/month).[1]

Key Facts

  • Ion beam lithography's subclass of is recorded as lithography[2].
  • Ion beam lithography's Freebase ID is recorded as /m/04174lp[3].
  • Ion beam lithography's Microsoft Academic ID is recorded as 2781048479[4].
  • Ion beam lithography's OpenAlex ID is recorded as C2781048479[5].

Why It Matters

Ion beam lithography ranks in the top 2% of general entities by monthly Wikipedia readership (24 views/month).[1] It has Wikipedia articles in 5 language editions, a strong signal of global cultural recognition.[6]

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). Ion beam lithography. Retrieved April 10, 2026, from https://4ort.xyz/entity/ion-beam-lithography
MLA “Ion beam lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 10 Apr. 2026, https://4ort.xyz/entity/ion-beam-lithography.
BibTeX @misc{4ortxyz_ion-beam-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Ion beam lithography}}, year = {2026}, url = {https://4ort.xyz/entity/ion-beam-lithography}, note = {Accessed: 2026-04-10}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Ion beam lithography — https://4ort.xyz/entity/ion-beam-lithography (retrieved 2026-04-10)

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