Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
Summary
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS is a scholarly article[1].
Key Facts
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS's instance of is recorded as scholarly article[2].
References
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APA4ort.xyz Knowledge Graph. (2026). Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS. Retrieved May 24, 2026, from https://4ort.xyz/entity/improving-the-crystallinity-and-texture-of-oblique-angle-deposited-aln-thin-films-using-reactive-synchronized-hipims
MLA“Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/improving-the-crystallinity-and-texture-of-oblique-angle-deposited-aln-thin-films-using-reactive-synchronized-hipims.
BibTeX@misc{4ortxyz_improving-the-crystallinity-and-texture-of-oblique-angle-deposited-aln-thin-films-using-reactive-synchronized-hipims_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS}}, year = {2026}, url = {https://4ort.xyz/entity/improving-the-crystallinity-and-texture-of-oblique-angle-deposited-aln-thin-films-using-reactive-synchronized-hipims}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS — https://4ort.xyz/entity/improving-the-crystallinity-and-texture-of-oblique-angle-deposited-aln-thin-films-using-reactive-synchronized-hipims (retrieved 2026-05-24)
