Home › Entities › academia › Improving scanner wafer alignment performance by target optimization

Improving scanner wafer alignment performance by target optimization

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 12× · AI/ML
academia openalex:W2310983434
Press Enter · cited answer in seconds

Improving scanner wafer alignment performance by target optimization

Summary

Improving scanner wafer alignment performance by target optimization is a scholarly article[1].

Key Facts

  • Improving scanner wafer alignment performance by target optimization's instance of is recorded as scholarly article[2].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). Improving scanner wafer alignment performance by target optimization. Retrieved May 24, 2026, from https://4ort.xyz/entity/improving-scanner-wafer-alignment-performance-by-target-optimization
MLA “Improving scanner wafer alignment performance by target optimization.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/improving-scanner-wafer-alignment-performance-by-target-optimization.
BibTeX @misc{4ortxyz_improving-scanner-wafer-alignment-performance-by-target-optimization_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Improving scanner wafer alignment performance by target optimization}}, year = {2026}, url = {https://4ort.xyz/entity/improving-scanner-wafer-alignment-performance-by-target-optimization}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Improving scanner wafer alignment performance by target optimization — https://4ort.xyz/entity/improving-scanner-wafer-alignment-performance-by-target-optimization (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/improving-scanner-wafer-alignment-performance-by-target-optimization · Last refreshed: