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Improvements in resist performance towards EUV HVM

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 62× · AI/ML
academia openalex:W2598677901
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Improvements in resist performance towards EUV HVM

Summary

Improvements in resist performance towards EUV HVM is a scholarly article[1].

Key Facts

  • Improvements in resist performance towards EUV HVM's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Improvements in resist performance towards EUV HVM. Retrieved May 24, 2026, from https://4ort.xyz/entity/improvements-in-resist-performance-towards-euv-hvm
MLA “Improvements in resist performance towards EUV HVM.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/improvements-in-resist-performance-towards-euv-hvm.
BibTeX @misc{4ortxyz_improvements-in-resist-performance-towards-euv-hvm_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Improvements in resist performance towards EUV HVM}}, year = {2026}, url = {https://4ort.xyz/entity/improvements-in-resist-performance-towards-euv-hvm}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Improvements in resist performance towards EUV HVM — https://4ort.xyz/entity/improvements-in-resist-performance-towards-euv-hvm (retrieved 2026-05-24)

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