Holistic feedforward control for the 5 nm logic node and beyond
Research article (Optical Microlithography XXXII, 2019) · cited 10× · AI/ML
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- [2] ↑ Holistic feedforward control for the 5 nm logic node and beyond — instance of (P31): scholarly article. wikidata.org.
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4ort.xyz Knowledge Graph. (2026). Holistic feedforward control for the 5 nm logic node and beyond. Retrieved May 24, 2026, from https://4ort.xyz/entity/holistic-feedforward-control-for-the-5-nm-logic-node-and-beyond
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“Holistic feedforward control for the 5 nm logic node and beyond.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/holistic-feedforward-control-for-the-5-nm-logic-node-and-beyond.
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@misc{4ortxyz_holistic-feedforward-control-for-the-5-nm-logic-node-and-beyond_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Holistic feedforward control for the 5 nm logic node and beyond}}, year = {2026}, url = {https://4ort.xyz/entity/holistic-feedforward-control-for-the-5-nm-logic-node-and-beyond}, note = {Accessed: 2026-05-24}}
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