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High-resolution EUV lithography using a multi-trigger resist

Research article (Extreme Ultraviolet (EUV) Lithography IX, 2018) · cited 13× · AI/ML
academia openalex:W2792417832
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High-resolution EUV lithography using a multi-trigger resist

Summary

High-resolution EUV lithography using a multi-trigger resist is a scholarly article[1].

Key Facts

  • High-resolution EUV lithography using a multi-trigger resist's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). High-resolution EUV lithography using a multi-trigger resist. Retrieved May 24, 2026, from https://4ort.xyz/entity/high-resolution-euv-lithography-using-a-multi-trigger-resist
MLA “High-resolution EUV lithography using a multi-trigger resist.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/high-resolution-euv-lithography-using-a-multi-trigger-resist.
BibTeX @misc{4ortxyz_high-resolution-euv-lithography-using-a-multi-trigger-resist_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{High-resolution EUV lithography using a multi-trigger resist}}, year = {2026}, url = {https://4ort.xyz/entity/high-resolution-euv-lithography-using-a-multi-trigger-resist}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): High-resolution EUV lithography using a multi-trigger resist — https://4ort.xyz/entity/high-resolution-euv-lithography-using-a-multi-trigger-resist (retrieved 2026-05-24)

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