Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach

Research article (2017 13th IEEE Conference on Automation Science and Engineering (CASE), 2017) · cited 14× · AI/ML
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Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach

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Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach. Retrieved May 24, 2026, from https://4ort.xyz/entity/hidden-markov-model-based-predictive-maintenance-in-semiconductor-manufacturing-a-genetic-algorithm-approach
MLA “Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/hidden-markov-model-based-predictive-maintenance-in-semiconductor-manufacturing-a-genetic-algorithm-approach.
BibTeX @misc{4ortxyz_hidden-markov-model-based-predictive-maintenance-in-semiconductor-manufacturing-a-genetic-algorithm-approach_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach}}, year = {2026}, url = {https://4ort.xyz/entity/hidden-markov-model-based-predictive-maintenance-in-semiconductor-manufacturing-a-genetic-algorithm-approach}, note = {Accessed: 2026-05-24}}
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