Gradient-based inverse extreme ultraviolet lithography
Research article (Applied Optics, 2015) · cited 15× · AI/ML
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Direct Wikidata claims
- [2] ↑ Gradient-based inverse extreme ultraviolet lithography — instance of (P31): scholarly article. wikidata.org.
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4ort.xyz Knowledge Graph. (2026). Gradient-based inverse extreme ultraviolet lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/gradient-based-inverse-extreme-ultraviolet-lithography
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“Gradient-based inverse extreme ultraviolet lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/gradient-based-inverse-extreme-ultraviolet-lithography.
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@misc{4ortxyz_gradient-based-inverse-extreme-ultraviolet-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Gradient-based inverse extreme ultraviolet lithography}}, year = {2026}, url = {https://4ort.xyz/entity/gradient-based-inverse-extreme-ultraviolet-lithography}, note = {Accessed: 2026-05-24}}
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