Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor

Research article (IEEE Transactions on Control Systems Technology, 2015) · cited 25× · AI/ML
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Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor

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Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor. Retrieved May 24, 2026, from https://4ort.xyz/entity/generalized-predictive-control-of-temperature-on-an-atomic-layer-deposition-reactor
MLA “Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/generalized-predictive-control-of-temperature-on-an-atomic-layer-deposition-reactor.
BibTeX @misc{4ortxyz_generalized-predictive-control-of-temperature-on-an-atomic-layer-deposition-reactor_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor}}, year = {2026}, url = {https://4ort.xyz/entity/generalized-predictive-control-of-temperature-on-an-atomic-layer-deposition-reactor}, note = {Accessed: 2026-05-24}}
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