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Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning
Research article (Optics Express, 2019) · cited 14× · AI/ML
Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning
Summary
Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning is a scholarly article[1].
Key Facts
Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning. Retrieved May 24, 2026, from https://4ort.xyz/entity/fast-lithographic-source-optimization-method-of-certain-contour-sampling-bayesian-compressive-sensing-for-high-fidelity-
MLA“Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/fast-lithographic-source-optimization-method-of-certain-contour-sampling-bayesian-compressive-sensing-for-high-fidelity-.
BibTeX@misc{4ortxyz_fast-lithographic-source-optimization-method-of-certain-contour-sampling-bayesian-compressive-sensing-for-high-fidelity-_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning}}, year = {2026}, url = {https://4ort.xyz/entity/fast-lithographic-source-optimization-method-of-certain-contour-sampling-bayesian-compressive-sensing-for-high-fidelity-}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning — https://4ort.xyz/entity/fast-lithographic-source-optimization-method-of-certain-contour-sampling-bayesian-compressive-sensing-for-high-fidelity- (retrieved 2026-05-24)
