Fast aerial image model for EUV lithography using the adjoint fully convolutional network

Research article (Optics Express, 2022) · cited 12× · AI/ML
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Fast aerial image model for EUV lithography using the adjoint fully convolutional network

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Fast aerial image model for EUV lithography using the adjoint fully convolutional network is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Fast aerial image model for EUV lithography using the adjoint fully convolutional network. Retrieved May 24, 2026, from https://4ort.xyz/entity/fast-aerial-image-model-for-euv-lithography-using-the-adjoint-fully-convolutional-network
MLA “Fast aerial image model for EUV lithography using the adjoint fully convolutional network.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/fast-aerial-image-model-for-euv-lithography-using-the-adjoint-fully-convolutional-network.
BibTeX @misc{4ortxyz_fast-aerial-image-model-for-euv-lithography-using-the-adjoint-fully-convolutional-network_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Fast aerial image model for EUV lithography using the adjoint fully convolutional network}}, year = {2026}, url = {https://4ort.xyz/entity/fast-aerial-image-model-for-euv-lithography-using-the-adjoint-fully-convolutional-network}, note = {Accessed: 2026-05-24}}
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