Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method

Research article (Micromachines, 2017) · cited 52× · AI/ML
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Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method

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Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method is a scholarly article[1].

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  • Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method. Retrieved May 24, 2026, from https://4ort.xyz/entity/fabrication-of-hexagonal-microlens-arrays-on-single-crystal-silicon-using-the-tool-servo-driven-segment-turning-method
MLA “Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/fabrication-of-hexagonal-microlens-arrays-on-single-crystal-silicon-using-the-tool-servo-driven-segment-turning-method.
BibTeX @misc{4ortxyz_fabrication-of-hexagonal-microlens-arrays-on-single-crystal-silicon-using-the-tool-servo-driven-segment-turning-method_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method}}, year = {2026}, url = {https://4ort.xyz/entity/fabrication-of-hexagonal-microlens-arrays-on-single-crystal-silicon-using-the-tool-servo-driven-segment-turning-method}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method — https://4ort.xyz/entity/fabrication-of-hexagonal-microlens-arrays-on-single-crystal-silicon-using-the-tool-servo-driven-segment-turning-method (retrieved 2026-05-24)

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