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Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses

Research article (Microelectronic Engineering, 2018) · cited 42× · AI/ML
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Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses

Summary

Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses is a scholarly article[1].

Key Facts

  • Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses. Retrieved May 24, 2026, from https://4ort.xyz/entity/exploiting-atomic-layer-deposition-for-fabricating-sub-10-nm-x-ray-lenses
MLA “Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/exploiting-atomic-layer-deposition-for-fabricating-sub-10-nm-x-ray-lenses.
BibTeX @misc{4ortxyz_exploiting-atomic-layer-deposition-for-fabricating-sub-10-nm-x-ray-lenses_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses}}, year = {2026}, url = {https://4ort.xyz/entity/exploiting-atomic-layer-deposition-for-fabricating-sub-10-nm-x-ray-lenses}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses — https://4ort.xyz/entity/exploiting-atomic-layer-deposition-for-fabricating-sub-10-nm-x-ray-lenses (retrieved 2026-05-24)

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