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EUV high-NA scanner and mask optimization for sub-8nm resolution

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 12× · AI/ML
academia openalex:W3214411656
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EUV high-NA scanner and mask optimization for sub-8nm resolution

Summary

EUV high-NA scanner and mask optimization for sub-8nm resolution is a scholarly article[1].

Key Facts

  • EUV high-NA scanner and mask optimization for sub-8nm resolution's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). EUV high-NA scanner and mask optimization for sub-8nm resolution. Retrieved May 24, 2026, from https://4ort.xyz/entity/euv-high-na-scanner-and-mask-optimization-for-sub-8nm-resolution
MLA “EUV high-NA scanner and mask optimization for sub-8nm resolution.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/euv-high-na-scanner-and-mask-optimization-for-sub-8nm-resolution.
BibTeX @misc{4ortxyz_euv-high-na-scanner-and-mask-optimization-for-sub-8nm-resolution_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{EUV high-NA scanner and mask optimization for sub-8nm resolution}}, year = {2026}, url = {https://4ort.xyz/entity/euv-high-na-scanner-and-mask-optimization-for-sub-8nm-resolution}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): EUV high-NA scanner and mask optimization for sub-8nm resolution — https://4ort.xyz/entity/euv-high-na-scanner-and-mask-optimization-for-sub-8nm-resolution (retrieved 2026-05-24)

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