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Etch proximity correction through machine-learning-driven etch bias model

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 17× · AI/ML
academia openalex:W2309891466
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Etch proximity correction through machine-learning-driven etch bias model

Summary

Etch proximity correction through machine-learning-driven etch bias model is a scholarly article[1].

Key Facts

  • Etch proximity correction through machine-learning-driven etch bias model's instance of is recorded as scholarly article[2].

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

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  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Etch proximity correction through machine-learning-driven etch bias model. Retrieved May 24, 2026, from https://4ort.xyz/entity/etch-proximity-correction-through-machine-learning-driven-etch-bias-model
MLA “Etch proximity correction through machine-learning-driven etch bias model.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/etch-proximity-correction-through-machine-learning-driven-etch-bias-model.
BibTeX @misc{4ortxyz_etch-proximity-correction-through-machine-learning-driven-etch-bias-model_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Etch proximity correction through machine-learning-driven etch bias model}}, year = {2026}, url = {https://4ort.xyz/entity/etch-proximity-correction-through-machine-learning-driven-etch-bias-model}, note = {Accessed: 2026-05-24}}
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