Home › Entities › academia › Enabling scanning electron microscope contour-based optical proximity correction models

Enabling scanning electron microscope contour-based optical proximity correction models

Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2015) · cited 19× · AI/ML
academia openalex:W1978280934
Press Enter · cited answer in seconds

Enabling scanning electron microscope contour-based optical proximity correction models

Summary

Enabling scanning electron microscope contour-based optical proximity correction models is a scholarly article[1].

Key Facts

  • Enabling scanning electron microscope contour-based optical proximity correction models's instance of is recorded as scholarly article[2].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). Enabling scanning electron microscope contour-based optical proximity correction models. Retrieved May 24, 2026, from https://4ort.xyz/entity/enabling-scanning-electron-microscope-contour-based-optical-proximity-correction-models
MLA “Enabling scanning electron microscope contour-based optical proximity correction models.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/enabling-scanning-electron-microscope-contour-based-optical-proximity-correction-models.
BibTeX @misc{4ortxyz_enabling-scanning-electron-microscope-contour-based-optical-proximity-correction-models_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Enabling scanning electron microscope contour-based optical proximity correction models}}, year = {2026}, url = {https://4ort.xyz/entity/enabling-scanning-electron-microscope-contour-based-optical-proximity-correction-models}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Enabling scanning electron microscope contour-based optical proximity correction models — https://4ort.xyz/entity/enabling-scanning-electron-microscope-contour-based-optical-proximity-correction-models (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/enabling-scanning-electron-microscope-contour-based-optical-proximity-correction-models · Last refreshed: