Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling

Research article (Optics Express, 2021) · cited 22× · AI/ML
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Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling

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Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling. Retrieved May 24, 2026, from https://4ort.xyz/entity/efficient-optical-proximity-correction-based-on-virtual-edge-and-mask-pixelation-with-two-phase-sampling
MLA “Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/efficient-optical-proximity-correction-based-on-virtual-edge-and-mask-pixelation-with-two-phase-sampling.
BibTeX @misc{4ortxyz_efficient-optical-proximity-correction-based-on-virtual-edge-and-mask-pixelation-with-two-phase-sampling_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling}}, year = {2026}, url = {https://4ort.xyz/entity/efficient-optical-proximity-correction-based-on-virtual-edge-and-mask-pixelation-with-two-phase-sampling}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling — https://4ort.xyz/entity/efficient-optical-proximity-correction-based-on-virtual-edge-and-mask-pixelation-with-two-phase-sampling (retrieved 2026-05-24)

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