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Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography
Research article (Microelectronic Engineering, 2018) · cited 14× · AI/ML
Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography
Summary
Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography is a scholarly article[1].
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Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/dose-regularization-via-filtering-and-projection-an-open-source-code-for-optimization-based-proximity-effect-correction-
MLA“Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/dose-regularization-via-filtering-and-projection-an-open-source-code-for-optimization-based-proximity-effect-correction-.
BibTeX@misc{4ortxyz_dose-regularization-via-filtering-and-projection-an-open-source-code-for-optimization-based-proximity-effect-correction-_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography}}, year = {2026}, url = {https://4ort.xyz/entity/dose-regularization-via-filtering-and-projection-an-open-source-code-for-optimization-based-proximity-effect-correction-}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography — https://4ort.xyz/entity/dose-regularization-via-filtering-and-projection-an-open-source-code-for-optimization-based-proximity-effect-correction- (retrieved 2026-05-24)
