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Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
4ort.xyz Knowledge Graph. (2026). Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables. Retrieved October 18, 2026, from https://4ort.xyz/entity/data-driven-iterative-feedforward-tuning-for-a-wafer-stage-a-high-order-approach-based-on-instrumental-variables
“Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables.” 4ort.xyz Knowledge Graph, 4ort.xyz, 18 Oct. 2026, https://4ort.xyz/entity/data-driven-iterative-feedforward-tuning-for-a-wafer-stage-a-high-order-approach-based-on-instrumental-variables.
@misc{4ortxyz_data-driven-iterative-feedforward-tuning-for-a-wafer-stage-a-high-order-approach-based-on-instrumental-variables_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables}}, year = {2026}, url = {https://4ort.xyz/entity/data-driven-iterative-feedforward-tuning-for-a-wafer-stage-a-high-order-approach-based-on-instrumental-variables}, note = {Accessed: 2026-10-18}}
According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables — https://4ort.xyz/entity/data-driven-iterative-feedforward-tuning-for-a-wafer-stage-a-high-order-approach-based-on-instrumental-variables (retrieved 2026-10-18)
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