Contacts and lines SEM image metrology with SMILE
Research article (Photomask Technology 2021, 2021) · cited 11× · AI/ML
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Direct Wikidata claims
- [2] ↑ Contacts and lines SEM image metrology with SMILE — instance of (P31): scholarly article. wikidata.org.
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APA
4ort.xyz Knowledge Graph. (2026). Contacts and lines SEM image metrology with SMILE. Retrieved May 24, 2026, from https://4ort.xyz/entity/contacts-and-lines-sem-image-metrology-with-smile
MLA
“Contacts and lines SEM image metrology with SMILE.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/contacts-and-lines-sem-image-metrology-with-smile.
BibTeX
@misc{4ortxyz_contacts-and-lines-sem-image-metrology-with-smile_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Contacts and lines SEM image metrology with SMILE}}, year = {2026}, url = {https://4ort.xyz/entity/contacts-and-lines-sem-image-metrology-with-smile}, note = {Accessed: 2026-05-24}}
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According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Contacts and lines SEM image metrology with SMILE — https://4ort.xyz/entity/contacts-and-lines-sem-image-metrology-with-smile (retrieved 2026-05-24)
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