Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout
Summary
Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout is a scholarly article[1].
Key Facts
Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout. Retrieved May 24, 2026, from https://4ort.xyz/entity/contact-layer-decomposition-to-enable-dsa-with-multi-patterning-technique-for-standard-cell-based-layout
MLA“Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/contact-layer-decomposition-to-enable-dsa-with-multi-patterning-technique-for-standard-cell-based-layout.
BibTeX@misc{4ortxyz_contact-layer-decomposition-to-enable-dsa-with-multi-patterning-technique-for-standard-cell-based-layout_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout}}, year = {2026}, url = {https://4ort.xyz/entity/contact-layer-decomposition-to-enable-dsa-with-multi-patterning-technique-for-standard-cell-based-layout}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout — https://4ort.xyz/entity/contact-layer-decomposition-to-enable-dsa-with-multi-patterning-technique-for-standard-cell-based-layout (retrieved 2026-05-24)
