Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors

Research article (Journal of Microelectromechanical Systems, 2021) · cited 14× · AI/ML
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Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors

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Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors. Retrieved May 24, 2026, from https://4ort.xyz/entity/charge-based-capacitive-self-sensing-with-continuous-state-observation-for-resonant-electrostatic-mems-mirrors
MLA “Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/charge-based-capacitive-self-sensing-with-continuous-state-observation-for-resonant-electrostatic-mems-mirrors.
BibTeX @misc{4ortxyz_charge-based-capacitive-self-sensing-with-continuous-state-observation-for-resonant-electrostatic-mems-mirrors_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors}}, year = {2026}, url = {https://4ort.xyz/entity/charge-based-capacitive-self-sensing-with-continuous-state-observation-for-resonant-electrostatic-mems-mirrors}, note = {Accessed: 2026-05-24}}
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