Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography

Research article (ACS Omega, 2023) · cited 10× · AI/ML
Press Enter · cited answer in seconds

Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography

Summary

Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography is a scholarly article[1].

Key Facts

  • Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography's instance of is recorded as scholarly article[2].

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/canny-algorithm-enabling-precise-offline-line-edge-roughness-acquisition-in-high-resolution-lithography
MLA “Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/canny-algorithm-enabling-precise-offline-line-edge-roughness-acquisition-in-high-resolution-lithography.
BibTeX @misc{4ortxyz_canny-algorithm-enabling-precise-offline-line-edge-roughness-acquisition-in-high-resolution-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography}}, year = {2026}, url = {https://4ort.xyz/entity/canny-algorithm-enabling-precise-offline-line-edge-roughness-acquisition-in-high-resolution-lithography}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography — https://4ort.xyz/entity/canny-algorithm-enabling-precise-offline-line-edge-roughness-acquisition-in-high-resolution-lithography (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/canny-algorithm-enabling-precise-offline-line-edge-roughness-acquisition-in-high-resolution-lithography · Last refreshed: